文献类型：期刊文献

中文题名：面向NEMS器件的碳纳米管与金属电极电接触研究

英文题名：Research on Electric Contact between Carbon Nanotubes and Metal Electrodes for NEMS Device

作者：谭苗苗[1];张子义[1]

第一作者：谭苗苗

机构：[1]北京联合大学机电学院

第一机构：北京联合大学机器人学院

年份：2012

卷号：18

期号：5

起止页码：417-420

中文期刊名：功能材料与器件学报

外文期刊名：Journal of Functional Materials and Devices

收录：CSTPCD;;Scopus;北大核心:【北大核心2011】；CSCD:【CSCD_E2011_2012】；

语种：中文

中文关键词：碳纳米管;电接触;接触电阻;电子隧穿

外文关键词：Carbon nanotube; Electrical contact; contact resistance; electrons tunneling effect.

摘要：改善碳纳米管与金属电极的电接触是实现纳米器件的基础。基于电子隧穿效应的基本原理以及碳纳米管与金属表面接触的模型,得到了两者的接触间隙和接触长度是影响接触电阻的两个重要因素。通过接触电阻测量实验,比较了金电极包覆碳纳米管、钛电极包覆碳纳米管和碳纳米管沉积在金电极上这三种不同接触类型的接触状态,金电极包覆碳纳米管的接触方式具有较小的接触电阻平均值和分散性,接触状态比钛电极包覆碳纳米管和碳纳米管沉积在金电极上两种方式好,其接触电阻平均约为0.062MΩ。
Improving the electric contact between carbon nanotubes and metal electrodes is the basis of re- alizing NEMS device. Based on electrons tunneling effect principle and the contact model between carbon nanotube and metal electrode, both contact clearance and contact length are important factors influencing contact resistance. By testing contact resistances, three contact types including gold coated with carbon nanotubes, titanium coated with carbon nanotubes and carbon nanotubes deposition on gold electrodes were compared in experiment. It indicates that the contact type of gold electrodes coated with carbon nanotube have smaller contact resistance average and dispersion, and be better contact state than titanium electrode coated with carbon nanotube or carbon nanotube deposition on gold electrodes. An average of contact resistance for gold electrodes coated with carbon nanotube is about 0. 062MΩ.