文献类型：期刊文献

中文题名：溶胶-凝胶法二氧化硅增透膜的制备与研究

英文题名：Study on the SiO_2 antireflective coatings prepared by sol-gel method

作者：马永新[1];周友苏[1];万春平[1];章磊[1];张秀廷[2];赵旭[2];卢铁军[2]

第一作者：马永新

机构：[1]北京联合大学机电学院;[2]北京天瑞星真空技术开发有限公司

第一机构：北京联合大学机器人学院

年份：2008

期号：3

起止页码：298-300

中文期刊名：航天器环境工程

外文期刊名：Spacecraft Environment Engineering

收录：CSTPCD

语种：中文

中文关键词：溶胶.凝胶法;增透膜;正硅酸乙酯;正交设计

外文关键词：solgel; antireflection coatings;TEOS; orthogonal design

摘要：利用正硅酸乙酯为前驱体,乙醇为溶剂,采用溶胶-凝胶法在玻璃基片上制备二氧化硅增透膜,并结合正交试验设计的方法,分析了试验的最佳原料配比以及影响二氧化硅增透膜性能的主要因素。用紫外-可见光分光光度计测定了二氧化硅增透膜的透光率。实验研究结果显示:以盐酸为催化剂在普通玻璃上制备的增透膜,可使透光率平均提高约3%;膜层结构为非晶态;正硅酸乙酯和水的含量是主要影响因素。
The silica antireflective films on normal glass substrates were prepared by the sol-gel method with TEOS as the precursor to the ethanol solvent. Orthogonal experimental method was used to determine the best ratio of raw materials and the main factors which affect the properties of coatings. The microstructure and transmittance properties of thin films were characterized by X-ray diffraction and UV-Vis spectrophotometer. The results show that taking hydrochloric acid as catalyst in the preparation of coatings on glass substrates, the average transmission rate can be increased by 3%, the structure is amorphous, TEOS and water content are the main factors.